High performance Ga As Sb ∕ Ga As quantum well lasers S.-Q. Yu, D. Ding, J.-B. Wang, N. Samal, X. Jin, Y. Cao, S. R. Johnson, and Y.-H. Zhang Citation: Journal of Vacuum Science & Technology B 25, 1658 (2007); doi: 10.1116/1.2781531 View online: http://dx.doi.org/10.1116/1.2781531 View Table of Contents: http://scitation.aip.org/content/avs/journal/jvstb/25/5?ver=pdfcov Published by the AVS: Science & Technology of Materials, Interfaces, and Processing Articles you may be interested in Highly tensile-strained, type-II, Ga 1 − x In x As / GaSb quantum wells Appl. Phys. Lett. 96, 062109 (2010); 10.1063/1.3303821 Nitrogen incorporation and optical studies of Ga As Sb N ∕ Ga As single quantum well heterostructures J. Appl. Phys. 102, 053106 (2007); 10.1063/1.2777448 Effect of multilayer barriers on the optical properties of GaInNAs single quantum-well structures grown by metalorganic vapor phase epitaxy Appl. Phys. Lett. 87, 021903 (2005); 10.1063/1.1993758 Effect of temperature on the optical properties of GaAsSbN/GaAs single quantum wells grown by molecularbeam epitaxy J. Appl. Phys. 93, 4475 (2003); 10.1063/1.1560574 Growth of high-quality GaAs/AlAs Bragg mirrors on patterned InP-based quantum well mesa structures Appl. Phys. Lett. 71, 581 (1997); 10.1063/1.119800 Redistribution subject to AVS license or copyright; see http://scitation.aip.org/termsconditions. Download to IP: 209.147.144.20 On: Sat, 07 Feb 2015 23:24:00 High performance GaAsSb/ GaAs quantum well lasers S.-Q. Yu,a兲 D. Ding, J.-B. Wang, N. Samal, X. Jin, Y. Cao, S. R. Johnson, and Y.-H. Zhang Center for Solid State Electronics Research, Department of Electrical Engineering, Arizona State University, Tempe, Arizona 85287-6206 共Received 19 April 2007; accepted 13 August 2007; published 13 September 2007兲 GaAsSb/ GaAs quantum wells 共QWs兲 with 1.3 ␮m light emission are grown using solid-source molecular beam epitaxy. The growth temperature is optimized based on photoluminescence 共PL兲 linewidth and intensity and edge-emitting laser 共EEL兲 threshold current density; these measurements concur that the optimal growth temperature is ⬃490 ° C 共⬃500 ° C兲 for GaAsSb/ GaAs QWs grown with 共without兲 GaAsP strain compensation. High performance EELs and vertical-cavity surface-emitting lasers 共VCSELs兲 are demonstrated using the GaAsSb/ GaAs/ GaAsP strain compensated active region. One EEL achieved an output power up to 0.9 W with thresholds as low as 356 A / cm2 under room temperature pulsed operation, while another achieved continuous-wave 共cw兲 operation at temperatures up to 48 ° C for wavelengths as long as 1260 nm. A set of VCSELs achieved room temperature cw operation with output powers from 0.03 to 0.2 mW and lasing wavelengths from 1240 to 1290 nm. The temperature characteristics of these devices indicate that the optimal gain-peak cavity-mode tuning for pulsed operation specifies a room temperature PL peak redshift of 20– 30 nm relative to the cavity mode. © 2007 American Vacuum Society. 关DOI: 10.1116/1.2781531兴 I. INTRODUCTION Vertical-cavity surface-emitting lasers 共VCSELs兲 operating at 1.3 ␮m are of great interest for low-cost data transmission applications such as fiber to the home, local area networks, and free-space optical interconnects. As the preferred substrate for 1.3 ␮m VCSELs, GaAs permits the growth of near lattice-matched GaAs/ AlGaAs distributed Bragg reflectors 共DBRs兲, which have superior optical and thermal properties when compared to other III-V DBRs. Furthermore, the fabrication of GaAs based 1.3 ␮m VCSELs can take full advantage of the industrial standard 850 nm VCSEL fabrication technology, which is attractive from a manufacturing point of view. GaAsSb quantum wells 共QWs兲 have been shown to be one of the most suitable candidates for 1.3 ␮m active regions on the GaAs substrate.1–12 The growth of high quality GaAsSb QWs using molecular beam epitaxy 共MBE兲 can be challenging.13–15 GaAsSb QWs are highly strained 共⬃2.7% 兲 at the composition necessary to achieve 1.3 ␮m emission. The strain not only limits the maximum QW number that can be grown without misfit dislocations but also results in the strain-driven in-plane composition fluctuations that cause inhomogeneous linewidth broadening14 and reduce internal quantum efficiency. Moreover, the growth of mixed group-V materials requires additional calibration work since the group-V species 共As and Sb兲 have a less than unity sticking coefficient that varies with both growth temperature and the relative flux of each group-V element. The quality of GaAsSb/ GaAs QWs for 1.3 ␮m light emission can be improved by introducing GaAsP strain compensation layers and further optimizing the growth conditions of the resulting five-layer QW system.14 a兲 Author to whom correspondence should be addressed; electronic mail: yushq@asu.edu 1658 J. Vac. Sci. Technol. B 25„5…, Sep/Oct 2007 As a result, high internal quantum efficiency edge-emitting lasers 共EELs兲 and high power VCSELs have been demonstrated using this active region structure.8,11,12,16 Realizing GaAsSb/ GaAs based VCSELs can be challenging because a nearly flat conduction band alignment between GaAs and GaAsSb results in the weak confinement of electrons and the strong confinement of holes and a less than ideal electron-hole wave function overlap that limits gain.15,17 Furthermore, the combination of limited gain and in-plane composition fluctuations bring about a significant blueshift in the gain peak under injection.16 This is an important design concern, as the key to good VCSEL performance is the excellent alignment of the gain peak and the cavity mode at the operating temperature. In designing a VCSEL, it is convenient to establish this alignment based on a wavelength difference between the room temperature active region photoluminescence 共PL兲 peak and the cavity mode. For GaAs and InGaAs active materials, the gain-peak position is governed by thermal effects and is insensitive to band filling under high injection. Therefore, the design rule for GaAs or InGaAs VCSELs is to have the room temperature PL peak slightly blueshifted relative to the cavity mode.18–20 In which case, the active region heats up under continuous-wave 共cw兲 operation, and since the gain-peak redshift with temperature exceeds that of the cavity mode, the gain peak and cavity mode are aligned at the operating temperature. However, the design rule for GaAsSb VCSELs is not as straightforward since in addition to the thermal induced redshift, there is a substantial gain-peak blueshift due to band filling under high injection. This article studies the issues related to the optimization and growth of 1.3 ␮m, strain compensated GaAsSb/ GaAs/ GaAsP QW structures for laser applications, including the performance characteristics of high power, cw, room 1071-1023/2007/25„5…/1658/6/$23.00 ©2007 American Vacuum Society 1658 Redistribution subject to AVS license or copyright; see http://scitation.aip.org/termsconditions. Download to IP: 209.147.144.20 On: Sat, 07 Feb 2015 23:24:00 1659 Yu et al.: High performance GaAsSb/ GaAs quantum well lasers FIG. 1. Calculated wavelength of the first energy transition in a GaAsP / GaAs/ GaAsSb/ GaAs/ GaAsP 共9 / 5 / 7 / 5 / 9 nm兲 five-layer QW structure as a function of Sb composition. temperature EELs and VCSELs, and the competing effects of a thermally induced redshift and an injection induced blueshift on the design rules of GaAsSb based VCSELs. II. STRAIN COMPENSATED GaAsSb QWs The critical layer thickness for pseudomorphically strained GaAs0.6Sb0.4 on GaAs is approximately 7 nm;21 critical layer thickness not only limits the thickness of each QW, it also limits the total number of QWs that can be consecutively grown. The latter can be overcome by adding tensile strain layers between the QWs, for which GaAsP is readily available and as well offers enhanced electron confinement when placed either side and near to the GaAsSb/ GaAs QW. In this work, a five-layer GaAsP / GaAs/ GaAsSb/ GaAs/ GaAsP strain compensated QW system is developed. The ground-state transition wavelength for this five-layer system with layer thicknesses 9 / 5 / 7 / 5 / 9 nm is calculated using the transfer-matrix method and plotted as a function of Sb mole fraction in Fig. 1. The material parameters used for GaAs1−xSbx are linearly interpolated between those of GaAs and GaSb except the formula for the band gap of unstrained bulk GaAs1−xSbx, which has a substantial bowing parameter and is given by17 Eg共x兲 = 1.43共1 − x兲 + 0.73 − 1.58x共1 − x兲. 共1兲 The Sb mole fraction is ⬃0.36 for the light emission at 1.3 ␮m. The materials studied in this work are grown by solidsource molecular beam epitaxy using a VG V80H system equipped with As, Sb, and P valved crackers to control the mixed group-V composition of the active layers. To calibrate the composition of GaAsSb layers, two sets of GaAsSb PL samples are studied. These samples contain the above mentioned five-layer QW system, with a 50 nm thick GaAs space layer on either side, that is sandwiched between two 50 nm 1659 thick Al0.25Ga0.75As barrier layers, all of which is grown on top of a 400 nm thick GaAs buffer on a n+-GaAs 共100兲 substrate and capped by a 30 nm thick GaAs layer. The GaAs buffer and cap and AlGaAs barriers are grown at 590 ° C and the substrate temperature is ramped down 共up兲 without interruption during the growth of the first 共second兲 50 nm GaAs spacer to the much lower 490 ° C growth temperature of the active region. The V/III flux ratios 共FAs/Ga and FSb/Ga兲 used during the GaAsSb layer growth are FAs/Ga = 0.90, with FSb/Ga varying from 0.2 to 0.4 for the first set of PL samples, and FAs/Ga = 1.0, with FSb/Ga varying from 1.0 to 5.0 for the second set of PL samples. The flux ratio used here is the ratio of the group-V flux rate over the group-III flux rate where both are in units of atoms per unit area per unit time. The GaAs growth rate was 15 nm/ min and the P flux ratio was fixed during the growth of the GaAsP layers in both sets of PL samples. The Sb mole fraction of the GaAsSb active region is determined from the PL peak position and is plotted as a function of FSb/Ga and FAs/Ga in Fig. 2共a兲. The power law equation, xSi = 关a共FAs/Ga兲b/共FSb/Ga兲c + 1兴−1 , 共2兲 is fit to the data 共see solid curves兲, where xSb is the Sb mole fraction of the GaAs1−xSbx layer, FAs/Ga and FSb/Ga are the As/ Ga and Sb/ Ga flux ratios, and a, b, and c are fitting parameters whose values are listed in the inset of Fig. 2共a兲. Similarly, three sets of GaAsP PL samples with a GaAsP QW sandwiched between two AlGaAs barriers were grown at various V/III ratios 共FP/Ga and FAs/Ga兲 to calibrate the GaAsP composition; the P mole fraction as function of FP/Ga and FAs/Ga is shown in Fig. 2共b兲. Equation 共2兲 共with FSb/Ga replaced by FP/Ga兲 is fit to the data 共see solid curves兲 and the fitting parameters are listed in the inset of Fig. 2共b兲. These parameters provide insight into the incorporation efficiency of the two group-V elements during the growth of mixed As–Sb and mixed As–P ternaries. Of the three fitting parameters in Eq. 共2兲, a and c are similar and b is larger than c for both GaAsSb and GaAsP; this result indicates that As incorporates more efficiently than either P or Sb. Furthermore, the difference between b and c for GaAsSb is much greater than that for GaAsP, indicating that Sb does not compete nearly as efficiently with As as P does. The growth temperature of the active region is further optimized by comparing the room temperature PL peak intensity, PL linewidth, and pulsed threshold current density of broad-area EELs with triple-QW active regions 共without GaAsP strain compensation兲 that were grown at various substrate temperatures. A plot of the measurement results versus growth temperature is shown in Fig. 3. All three curves, PL peak intensity 共upper plot兲, PL linewidth 共middle plot兲, and threshold current density 共lower plot兲, concur that the optimal growth temperature is ⬃500 ° C. Similar growth studies indicate that the optimal growth temperature for the fivelayer, strain compensated, GaAsP / GaAs/ GaAsSb/ GaAs/ GaAsP QW system is ⬃490 ° C. The introduction of GaAsP strain compensation layers to GaAsSb/ GaAs QWs JVST B - Microelectronics and Nanometer Structures Redistribution subject to AVS license or copyright; see http://scitation.aip.org/termsconditions. Download to IP: 209.147.144.20 On: Sat, 07 Feb 2015 23:24:00 1660 Yu et al.: High performance GaAsSb/ GaAs quantum well lasers 1660 FIG. 3. EEL wafer PL intensity 共upper plot兲, PL linewidth 共middle plot兲, and threshold current density 共lower plot兲 versus GaAsSb QW growth temperature. FIG. 2. 共a兲 Sb mole fraction versus Sb/ Ga and As/ Ga flux ratios for MBE grown GaAs1−xSbx alloys. 共b兲 P mole fraction versus P / Ga and As/ Ga flux ratios for MBE grown GaAs1−xPx. The solid curves are fits of Eq. 共2兲 to the data; the fitting parameters are listed in the table shown in each plot. can reduce the PL linewidth by up to a factor of 2,14 indicating that the addition of strain compensation substantially reduces the strain-driven Sb segregation. III. HIGH POWER, ROOM TEMPERATURE, CONTINUOUS-WAVE EDGE-EMITTING LASERS Two high performance EEL devices, labeled A and B, are studied; these devices utilize strain compensated GaAsSb QWs grown under optimized growth conditions. The active region of device A 共B兲 is a single 共triple兲 QW GaAs0.9P0.1 / GaAs/ GaAs0.7Sb0.3 / GaAs/ GaAs0.9P0.1 with 8 / 3 / 7 / 3 / 8 nm 共9 / 5 / 7 / 5 / 9 nm兲 thicknesses. The nominal Sb concentration is 30%, a value estimated from PL measurements and modeling. The active region in device A is sandwiched between two 78 nm thick Al0.20Ga0.75As layers, followed by two 150 nm thick linearly graded AlGaAs lay- ers, with Al mole fractions of 25%–65%, to form a gradedindex 共GRIN兲 waveguide, followed by a Si-doped 共2 ⫻ 1018 cm−3兲, 1.8 ␮m thick, n-type Al0.65Ga0.35As cladding layer and a 500 nm thick GaAs buffer layer on the substrate side and a Be-doped 共2 ⫻ 1018 cm−3兲, 1.8 ␮m thick, p-type Al0.65Ga0.35As cladding layer and a 100 nm thick GaAs contact layer on the surface side. The doping concentration is decreased from 2 ⫻ 1018 to 1 ⫻ 1017 cm−3 in both the p and n GRIN layers and is increased to 2 ⫻ 1019 cm−3 in the p-contact layer. Device B has a similar structure, except that the active region is sandwiched between two 20 nm Al0.25Ga0.75As layers and both the p- and n-type Al0.65Ga0.35As cladding layers are 2 ␮m thick. The devices are fabricated using photolithography and inductively coupled plasma etching to define stripe ridges, ranging from 4 to 32 ␮m wide. By etching down to about 0.1 ␮m above the active region, these ridges provide current confinement as well as optical waveguiding. A photoresist mask is used to define the ridges, which also serves as a lift-off mask for the deposition of an Al2O3 isolation layer. This procedure ensures that a self-aligned contact window is exposed after lift-off. Wide Ti/ Pt/ Au p-contact stripes are deposited using a second mask, after which the wafers are lapped down to 100 ␮m thick and AuGe/ Ni/ Au n-metal contacts are deposited on the back side of the substrate; this is followed by rapid thermal annealing of both metal contacts. The wafers are cleaved to form EELs with various cavity lengths. The as-cleaved devices are mounted junction side up onto a temperature variable test stage. Room temperature pulsed measurements are performed using a 0.5 ␮s wide pulse and a 0.1% duty cycle. The power output is measured using a calibrated power meter equipped with an InGaAs detector and an integration sphere. Laser spectrum J. Vac. Sci. Technol. B, Vol. 25, No. 5, Sep/Oct 2007 Redistribution subject to AVS license or copyright; see http://scitation.aip.org/termsconditions. Download to IP: 209.147.144.20 On: Sat, 07 Feb 2015 23:24:00 1661 Yu et al.: High performance GaAsSb/ GaAs quantum well lasers 1661 FIG. 5. L-I curve of a GaAsSb/ GaAs QW EEL cw operating at 20 ° C with a 935 ␮m cavity length and a 16 ␮m ridge width. Inset 共a兲: threshold lasing spectrum at 25 ° C. Inset 共b兲: threshold lasing wavelength as a function of temperature. FIG. 4. Characterization results of a GaAsSb QW EEL with an 878 ␮m cavity length and a 32 ␮m ridge width. 共a兲 Pulsed L-I curve 共single facet兲. 共b兲 Electroluminescence and lasing spectra. measurements are performed using a 200 ␮m core diameter multimode fiber to couple the light into an ANDO 6315A optical spectrum analyzer. A typical power-current 共L-I兲 curve for device A 共single QW兲 with an 878 ␮m cavity length and a 32 ␮m stripe width is given in Fig. 4共a兲. The device is driven by currents up to 2500 mA. The maximum output power is 0.45 W/facet, for a total 0.9 W output. The device has a threshold current 共Ith兲 of 100 mA, which corresponds to a low threshold current density 共Jth兲 of 356 A / cm2. The small kink in the curve near 2000 mA is attributed to a detector measurement artifact due to a slow switching response during autoscaling. The emission spectra below threshold at 0.3Ith and 0.6Ith and just above threshold at 1.1Ith are given in Fig. 4共b兲; the luminescence peak blueshifts from 1228 nm at 0.3Ith to1205 nm at 0.6Ith and to 1190 nm at 1.1Ith. Temperature dependent threshold current measurements between 0 and 85 ° C exhibit a characteristic temperature of 60 K, which is close to previous reported results for this material system.5–7,10,12,16 Further temperature dependent device characterization work for this material system is reported in Ref. 16. A typical cw L-I curve at 20 ° C for device B 共triple QWs兲 with a 935 ␮m cavity length and a 16 ␮m stripe width is given in Fig. 5; the power output measurements were limited by the detector to a maximum of 2 mW. The lasing threshold current density was 1.27 kA/ cm2. The 25 ° C lasing spec- trum slightly above threshold is shown in Fig. 5, inset 共a兲. This device exhibited a cw laser output up to 48 ° C with wavelengths as long as 1260 nm. The threshold lasing wavelength increases from 1217 nm at 5 ° C to 1260 nm at 48 ° C 关see Fig. 5, inset 共b兲兴. This device also exhibits a significant blueshift under lasing operation; the room temperature PL peak wavelength is 1291 nm. This is the first reported GaAsSb/ GaAs QW EEL with room temperature cw operation in the vicinity of 1.3 ␮m. IV. ROOM TEMPERATURE CONTINUOUS-WAVE VCSELs Top-emitting VCSELs utilizing the triple five-layer strain compensated GaAsSb/ GaAs/ GaAsP QWs were also studied. In these devices, the active region is placed at the center of a one ␭ cavity that is between the upper DBR of 23 pair Be-doped p-type Al0.9Ga0.1As/ GaAs layers and the bottom DBR of 30.5 pair Si-doped n-type Al0.9Ga0.1As/ GaAs layers. A 50 nm thick p-type AlAs oxidation layer is placed 3␭ / 4 away from the cavity center in the p-DBR. Reflectance measurements were used to characterize the cavity mode of the as-grown wafer. PL measurements were performed by first etching away the top DBR so that the 514 nm Ar+ laser can directly pump the active region. The VCSELs were fabricated using standard photolithography and wet etching to define square 共120⫻ 120 ␮m2兲 mesas. The mesa etch went down through the p-DBR layer and was stopped 0.1 ␮m above the active region to expose the oxidation layer. Selective wet oxidation of the AlAs layer was performed in a steam environment to form an ⬃5 ⫻ 7 ␮m2 current confinement aperture. A Ti/ Au p contact was deposited on top of the mesa and a AuGe/ Ni/ Au n contact was deposited on the back side of the substrate. Finally, the devices were annealed at 400 ° C for 30 s to form Ohmic contacts. The devices were tested under cw operation at room temperature and exhibited peak powers ranging from 0.03 to 0.2 mW at wavelengths ranging from 1290 to JVST B - Microelectronics and Nanometer Structures Redistribution subject to AVS license or copyright; see http://scitation.aip.org/termsconditions. Download to IP: 209.147.144.20 On: Sat, 07 Feb 2015 23:24:00 1662 Yu et al.: High performance GaAsSb/ GaAs quantum well lasers 1662 FIG. 6. GaAsSb VCSEL L-I-V curve; the lasing spectrum at 1.1 times threshold is shown in the upper-left inset; the near field lasing profile is shown in the lower-right inset. 1240 nm, respectively, depending on where the device was located on the wafer. Figure 6 shows the light-currentvoltage 共L-I-V兲 characteristics and lasing spectrum 共upperleft inset兲 at 1.1 times threshold. The threshold current, turn-on voltage, and peak power are 3.7 mA, 1.5 V, and 0.18 mW, respectively. The ripples in the L-I curve are due to the optical feedback from the polished back side of the substrate. A three-dimensional near field image is shown in the lower-right inset of Fig. 6 and indicates that this VCSEL operates in a high order mode. Three VCSELs labeled C, D, and E were studied with respective PL peak and lasing cavity-mode wavelengths of 1278 and 1260 nm 共18 nm PL redshift兲, 1266 and 1285 nm 共19 nm PL blueshift兲, and 1291 and 1260 nm 共31 nm PL redshift兲 共see Table I兲. The lasing cavity-mode wavelengths are estimated from the cw lasing wavelengths. The device characteristics were determined using temperature dependent pulsed L-I measurements over a 0 – 90 ° C range. The lasing threshold current versus temperature exhibits very different tuning characteristics for these three VCSELs; the results are given in Fig. 7 for device C 共upper plot兲, device D 共middle plot兲, and device E 共lower plot兲. For device C, the threshold current increases slightly as the temperature increases from 0 to 60 ° C and the threshold increases steeply from 60 to 80 ° C. For device D, the threshold current decreases from 0 to 80 ° C. For device E, the threshold decreases from 0 to 10 ° C, is constant from 10 to 60 ° C, and increases from 60 to 90 ° C. TABLE I. Summary of device PL peak, cavity mode, and PL peak redshift to cavity mode for devices C, D, and E. VCSEL C D E PL peak 共nm兲 Cavity mode 共nm兲 PL peak redshift to cavity mode 共nm兲 1278 1266 1291 1260 1285 1260 18 −19 31 FIG. 7. Pulsed threshold current versus heat-sink temperature for three different GaAsSb QW VCSELs. V. DISCUSSION For the GaAsSb/ GaAs material system, the gain peak is substantially blueshifted relative to the PL peak under injection due to strong band filling and inhomogeneous Sb composition,16 which is confirmed by the EEL results reported above. The different VCSEL threshold temperature characteristics shown in Fig. 7 are attributed to a combination of this blueshift and different initial gain-peak cavitymode alignments; all devices tested were grown using the same recipe and processed back to back, and therefore similar electrical characteristics are expected. The room temperature PL peak relative to the cavity mode for devices C and E is redshifted by 18 and 31 nm, respectively. Consequently, the blueshift during lasing moves the gain peak toward the cavity mode, resulting in a low, temperature insensitive, threshold region from 10 to 60 ° C where the gain peak and the cavity mode are nearly aligned. Conversely, the room temperature PL peak relative to the cavity mode for device D is blueshifted by 19 nm. Consequently, the blueshift during lasing moves the gain peak even further away from the cavity mode, resulting in a high, temperature sensitive, threshold that continually improves from 0 to 90 ° C as the thermal redshift continually moves the gain peak toward the cavity mode. These results indicate that the room temperature PL peak should be redshifted by 20– 30 nm relative to the cavity mode for optimal pulsed performance. However, under cw operation, it is estimated that the active region temperature is ⬃40 ° C higher than the heat-sink temperature, causing a redshift of ⬃15 nm and a correspondingly reduced PL peak redshift for best room temperature cw performance. The gain-peak blueshift also contributes to the high order transverse mode operation shown in the lower-right inset of Fig. 6. For oxide confined VCSELs, there are two distinct cavity modes: one at the longer wavelengths specified by the as-grown cavity length that lies within the oxide aperture and J. Vac. Sci. Technol. B, Vol. 25, No. 5, Sep/Oct 2007 Redistribution subject to AVS license or copyright; see http://scitation.aip.org/termsconditions. Download to IP: 209.147.144.20 On: Sat, 07 Feb 2015 23:24:00 1663 Yu et al.: High performance GaAsSb/ GaAs quantum well lasers one at the shorter wavelengths specified by the shorter cavity length in the region outside the oxide aperture, where the high refractive index AlAs layer has been converted to a low refractive index 共optically thinner兲 Al2O3 layer. The spatial distribution of the modal gain at longer wavelengths conforms to the oxide aperture profile, which tends to support the single fundamental mode, provided that the aperture size is small 共typically 10⫻ 10 ␮m2 for GaAs or InGaAs based VCSELs兲, while at shorter wavelengths the profile is ringlike, which tends to support high order transverse modes. Therefore, when the peak modal gain at shorter wavelengths is larger 共due to the above mentioned blueshift兲, the high order transverse mode will prevail 共assuming the same optical losses for both modes兲. For the VCSEL shown in Fig. 6, the room temperature PL peak was close to the cavity mode, resulting in a blueshifted misalignment of the gain peak and cavity mode during lasing operation; this is expected to be the reason why this device exhibits a high order transverse modal behavior even though the oxide aperture is small. These distinctive gain properties of the GaAsSb material system require a different design rule for VCSELs. In order to have good gain-peak cavity-mode alignment during room temperature lasing, it is essential that the room temperature PL peak be at substantially longer wavelengths than the cavity mode. VI. CONCLUSIONS The MBE growth of GaAsSb containing active regions is optimized by performing temperature dependent photoluminescence intensity, linewidth, and threshold current density measurements on edge-emitting lasers. The optimal growth temperatures are found to be 490 ° C for strain compensated GaAsSb/ GaAs/ GaAsP active regions and 500 ° C for GaAsSb/ GaAs active regions. High performance edgeemitting lasers and vertical-cavity surface-emitting lasers are demonstrated using the strain compensated active region. The edge emitters demonstrated power outputs up to 0.9 W and threshold current densities as low as 356 A / cm2 under pulsed operation and wavelengths as long as 1260 nm at temperatures up to 48 ° C under cw operation. All edge- 1663 emitting lasers displayed a strong gain-peak blueshift under high injection. The oxide confined VCSELs demonstrated room temperature cw operation with power outputs from 0.03 to 0.2 mW and lasing wavelengths from 1240 to 1290 nm. A room temperature PL peak redshift of 20– 30 nm relative to the cavity mode provides the best pulsed operation performance for GaAsSb VCSELs. ACKNOWLEDGMENT This work is partially supported by the National Science Foundation under Grant No. 0070125. 1 T. Anan, K. Nishi, S. Sugou, M. Yamada, K. Tokutome, and A. Gomyo, Electron. Lett. 34, 2127 共1998兲. 2 T. Anan, M. Yamada, K. Tokutome, S. Sugou, K. Nishi, and A. Kamei, Electron. Lett. 35, 903 共1999兲. 3 P. Dowd et al., Appl. Phys. Lett. 75, 1267 共1999兲. 4 W. Braun et al., J. Appl. Phys. 88, 3004 共2000兲. 5 O. Blum and J. F. Klem, IEEE Photonics Technol. Lett. 12, 771 共2000兲. 6 M. Yamada, T. Anan, K. Tokutome, A. Kamei, K. Nishi, and S. Sugou, IEEE Photonics Technol. Lett. 12, 774 共2000兲. 7 S. Ryu and P. D. Dapkus, Electron. Lett. 36, 1387 共2000兲. 8 T. Anan, M. Yamada, K. Nishi, K. Kurihara, K. Tokutome, A. Kamei, and S. Sugou, Electron. Lett. 37, 566 共2001兲. 9 F. Quochi, D. C. Kilper, J. E. Cunningham, M. Dinu, and J. Shah, IEEE Photonics Technol. Lett. 13, 921 共2001兲. 10 P.-W. Liu, M.-H. Lee, H.-H. Lin, and J.-R. Chen, Electron. Lett. 38, 1354 共2002兲. 11 P. Dowd, S. R. Johnson, S. A. Feld, M. Adamcyk, S. A. Chaparro, J. Joseph, K. Hilgers, M. P. Horning, K. Shiralagi, and Y.-H. Zhang, Electron. Lett. 39, 987 共2003兲. 12 M. S. Noh, R. D. Dupuis, D. P. Bour, G. Walter, and N. Holonyak, Appl. Phys. Lett. 83, 2530 共2003兲. 13 J. F. Klem, O. Blum, S. R. Kurtz, I. J. Fritz, and K. D. Choquette, J. Vac. Sci. Technol. B 18, 1605 共2000兲. 14 S. R. Johnson et al., J. Vac. Sci. Technol. B 19, 1501 共2001兲. 15 S. R. Johnson et al., J. Cryst. Growth 251, 521 共2003兲. 16 S.-Q. Yu, X. Jin, S. R. Johnson, and Y.-H. Zhang, J. Vac. Sci. Technol. B 24, 1617 共2006兲. 17 J.-B. Wang et al., Phys. Rev. B 70, 195339 共2004兲. 18 B. Tell, K. F. Brown-Goebeler, R. E. Leibenguth, F. M. Baez, and Y. H. Lee, Appl. Phys. Lett. 60, 683 共1992兲. 19 D. B. Young, J. W. Scott, F. H. Peters, M. G. Peters, M. L. Majewski, B. J. Thibeault, S. W. Corzine, and L. A. Coldren, IEEE J. Quantum Electron. 29, 2013 共1993兲. 20 B. Lu, P. Zhou, J. Cheng, K. J. Malloy, and J. C. Zolper, Appl. Phys. Lett. 65, 1337 共1994兲. 21 J. W. Matthews and A. E. Blakeslee, J. Cryst. Growth 27, 118 共1974兲. JVST B - Microelectronics and Nanometer Structures Redistribution subject to AVS license or copyright; see http://scitation.aip.org/termsconditions. Download to IP: 209.147.144.20 On: Sat, 07 Feb 2015 23:24:00