Changes in luminescence emission induced by proton irradiation: InGaAs/GaAs quantum wells and quantum dots R. Leon, G. M. Swift, B. Magness, W. A. Taylor, Y. S. Tang, K. L. Wang, P. Dowd, and Y. H. Zhang Citation: Applied Physics Letters 76, 2074 (2000); doi: 10.1063/1.126259 View online: http://dx.doi.org/10.1063/1.126259 View Table of Contents: http://scitation.aip.org/content/aip/journal/apl/76/15?ver=pdfcov Published by the AIP Publishing Articles you may be interested in Room-temperature defect tolerance of band-engineered InAs quantum dot heterostructures J. Appl. Phys. 98, 053512 (2005); 10.1063/1.2037872 Proton-implantation-induced photoluminescence enhancement in self-assembled InAs/GaAs quantum dots Appl. Phys. Lett. 82, 2802 (2003); 10.1063/1.1568547 Proton-irradiation-induced intermixing of InGaAs quantum dots Appl. Phys. Lett. 82, 2053 (2003); 10.1063/1.1561153 Radiation hardness of InGaAs/GaAs quantum dots Appl. Phys. Lett. 82, 1941 (2003); 10.1063/1.1561165 Proton irradiation-induced intermixing in InGaAs/(Al)GaAs quantum wells and quantum-well lasers J. Appl. Phys. 85, 6786 (1999); 10.1063/1.370291 This article is copyrighted as indicated in the article. Reuse of AIP content is subject to the terms at: http://scitation.aip.org/termsconditions. Downloaded to IP: 209.147.144.21 On: Tue, 10 Feb 2015 00:38:32 APPLIED PHYSICS LETTERS VOLUME 76, NUMBER 15 10 APRIL 2000 Changes in luminescence emission induced by proton irradiation: InGaAsÕGaAs quantum wells and quantum dots R. Leon and G. M. Swift Jet Propulsion Laboratory, California Institute of Technology, 4800 Oak Grove Drive, Pasadena, California 91109 B. Magness and W. A. Taylor Department of Physics and Astronomy, California State University, Los Angeles, California 90032 Y. S. Tanga) and K. L. Wang Department of Electrical Engineering, University of California, Los Angeles, California 90095 P. Dowdb) and Y. H. Zhang Department of Electrical Engineering and Center for Solid State Electronics Research, Arizona State University, Tempe, Arizona 85287 共Received 14 October 1999; accepted for publication 14 February 2000兲 The photoluminescence 共PL兲 emission from InGaAs/GaAs quantum-well and quantum-dot 共QD兲 structures are compared after controlled irradiation with 1.5 MeV proton fluxes. Results presented here show a significant enhancement in radiation tolerance with three-dimensional quantum confinement. Some additional radiation-induced changes in photocarrier recombination from QDs, which include a slight increase in PL emission with low and intermediate proton doses, are also examined. © 2000 American Institute of Physics. 关S0003-6951共00兲01615-6兴 Semiconductor quantum dot 共QD兲 lasers with low threshold currents and high gain,1,2 and QD infrared photodetectors3 capable of incident photon absorption are showing successful implementations of the unique optical properties of self-forming semiconductor QDs. Future device applications include the use of coupled QDs as the basic structures in the fabrication of cellular automata in novel computing architectures4 and frequency domain optical storage5 based on self-assembled QDs. Minimizing the impact of radiation induced degradation in optoelectronic devices is important for several applications. In space, protons pose a particularly severe threat to both planetary and Earth-orbiting spacecraft because they produce damage effects by several mechanisms. Due to their mass, protons can cause significant displacement damage in the semiconductor lattice, which is the primary cause of performance degradation and failure in several types of semiconductor devices. The effects of proton irradiation are also of interest in the use of ion beam modification or ‘‘defect engineering’’ in electronic materials. Proton implantation is often used for device isolation in compound semiconductors,6 and can also be used to induce interfacial compositional disordering in both quantum wells7 and quantum dots,8 which in turn, results in blue-shifted photoluminescence emission from both types of quantum structures.9 Some of the fundamental properties of QDs suggest that optoelectronic devices incorporating QDs could tolerate more displacement damage than other heterostructures. One of them is based on a simple geometrical argument: the total volume percentage of the active region is very small 共in selfa兲 Present address: Research and Development Laboratories, Culver City, CA 90230. b兲 Present address: Nanyang Technological University, School of Electrical and Electronic Engineering, Singapore 639798. forming InGaAs/GaAs QDs surface coverage range from 5% to 25%, depending on growth conditions10兲. Therefore exciton localization in the QDs due to three-dimensional confinement 共the InGaAs dots used here average 5 nm height and 25 nm diameter兲 will reduce the probability of carrier nonradiative recombination at radiation induced defect centers outside the QDs. Here we compare the optical emission from InGaAs quantum well 共QW兲 and QD structures after controlled irradiation with 1.5 MeV protons. Details of the growth conditions of InGaAs/GaAs QDs by metal organic chemical vapor deposition have been described in previous work.10 After deposition of GaAs buffer layers at 650 °C, the temperature was lowered to 550 °C and nanometer sized InGaAs islands were grown by depositing ⬃5 ML of In0.6Ga0.4As. QW samples were obtained by stopping the growth of InGaAs before the onset of the Stranski– Krastanow transformation, giving thin 共1 nm兲 QWs. Ternary compositions between the samples were identical, and so was the capping layer thickness 共100 nm for both QDs and QWs兲, therefore these results are not dependent on material or proton energy loss differences. Atomic force microscopy and transmission electron microscopy10–13 have given structural information on island sizes and surface densities in capped and uncapped InGaAs QDs. Samples were irradiated at room temperature using a Van De Graaff accelerator with 1.5 MeV protons at doses ranging from 7⫻1011 to 2 ⫻1015 cm2 and a dose rate of 6⫻1012 proton/s. Dose uniformity was monitored using radiochromic film at low doses. Variable temperature photoluminescence 共PL兲 measurements 共from 4 K兲 were done using the 514 nm line of an Argon ion laser for excitation and a cooled Ge detector with lock-in techniques for signal detection. Figure 1 shows the effects of different proton fluences on the measured PL emission from both types of samples, This article is copyrighted as indicated in the article. Reuse of AIP content is subject to the terms at: http://scitation.aip.org/termsconditions. Downloaded to IP: 0003-6951/2000/76(15)/2074/3/$17.00 2074 © 2000 American Institute of Physics 209.147.144.21 On: Tue, 10 Feb 2015 00:38:32 Leon et al. Appl. Phys. Lett., Vol. 76, No. 15, 10 April 2000 2075 FIG. 2. Comparison of initial 共solid line兲 and postirradiation 共dotted line兲 PL spectra 共measured at 5 K兲 at a proton dose of 2.7⫻1012 cm2 from QD structures with low QD density (3.5⫻108 dots per cm2). The spectra were obtained at constant excitation and show simultaneous emission from QD and wetting layer states. than QWs. This increase in radiation hardness is significant, because QW based devices already represent a vast improvement in radiation tolerance over bulk devices like optocouplers, which show significant degradation with proton irradiation;16 and light emitting diodes 共LEDs兲 based on QWs have shown an order of magnitude greater tolerance to proton induced damage when compared to LEDs based on p – n junction geometries.17 These results show that QDs can be used in radiation hard optoelectronic devices. This is confirmed by recent data showing effects of phosphorus ion irradiation on QD laser diodes and detectors.18 Figure 2 shows some of the effects of proton irradiation in QD structures with a low QD density. These structures show a strong PL peak from the wetting layer 共WL兲. The FIG. 1. 共a兲 Comparison of PL spectra 共measured at 5 K兲 from InGaAs/GaAs quantum wells and from quantum dots in high surface densities (2.4 WL is a very thin QW which forms prior to the dots in ⫻1010 dots per cm2) after irradiation with selected proton fluxes. The solid Stranski–Krastanow growth. If the average QD separation is lines show spectra before irradiation. The dotted lines show spectra after 1.5 greater than the two-dimensional 共2D兲 diffusion lengths in MeV proton irradiation in doses 共per cm2兲 of 共1兲 7⫻1012, 共2兲 6⫻1013, 共3兲 15 12 13 14 the WL, recombination from WL states will occur for pho2⫻10 , 共4兲 3⫻10 , 共5兲 6⫻10 , and 共6兲 2⫻10 . 共b兲 Integrated PL emission normalized to the as-grown samples for QW and QDs as a function of tocarriers generated in the WL12–14 and PL peaks will be proton dose. observed from both structures. Figure 2 shows that proton irradiation has different effects on the WL peak 共at 1.3 eV兲 than on the QD peaks 共1.7 eV for the ground state—excited InGaAs/GaAs QDs and QWs. The differences in the nonstates emission is seen here兲. irradiated 共as-grown兲 PL emission are apparent and have Figure 1 共and Fig. 2兲 show a slight increase in PL signal been discussed in previous work9,12–14 Due to increased excitonic oscillator strength in the structures with three共from ⬃10% to 70%兲 after low to intermediate proton doses dimensional confinement,15 the integrated emission intensity 共from 7⫻1011 to 7⫻1012 cm2兲. Since no such increase is is greater, even though only a fraction of the area is covered observed in the QWs we attribute this PL enhancement to by QDs. Figure 1共a兲 also shows that the luminescence from effects from three-dimensional quantum confinement. Rethe QDs is broader. This inhomogeneous broadening origiduction of the phonon bottleneck by defect assisted phonon nates from slight size nonuniformities and from the effects of emission has been proposed19 as a mechanism to explain the 11 varying lateral strain in disordered dense dot ensembles. bright PL emission in QDs. Introduction of deep level deThe PL emission from the QW is at a higher energy than the fects as those originated from displacement damage might QDs because very thin QWs 共1 nm兲 are used to obtain provide additional relaxation paths20 for thermalization of dislocation-free In0.6Ga0.4As QWs. Figure 1共a兲 also shows carriers and therefore increase the luminescence emission. that proton irradiation did not shift the emission wavelength The mechanisms responsible for the small degradation in either QD or QW structures. Figure 1共b兲 compares the observed in the optical emission from QD structures 共with measured integrated PL intensities from QWs and QDs 共norproton fluences above 1013 cm2兲 also remain to be fully inmalized to the nonirradiated values兲 as a function of proton vestigated. Carrier generation, capture, transfer, and recomThis article is copyrighted as indicated in the article. Reuse of AIP content is subject to the terms at: http://scitation.aip.org/termsconditions. Downloaded to IP: dose. InGaAs QDs are seen to be more radiation tolerant bination in InGaAs QDs12–14 are limited by the photogener209.147.144.21 On: Tue, 10 Feb 2015 00:38:32 2076 Leon et al. Appl. Phys. Lett., Vol. 76, No. 15, 10 April 2000 degradation of the hole mobility in the GaAs barrier and InGaAs wetting layer,13 which peaks at ⬃80–100 K for nonirradiated structures. Mobility degradation due to proton damage in the barrier and WL would then affect carrier capture and transfer into the dots. Figure 3共b兲 shows a more pronounced decrease in the inhomogenous PL broadening with temperature after radiation damage. This decrease in the full width at half maximum 共FWHM兲 of the PL band has been attributed to carrier thermal emission from the smaller dots in the ensemble.13 With radiation damage, the onset of thermionic emission will also be acompanied by defect assisted nonradiative recombination, making this effect even stronger, which might explain the stronger decrease in inhomogeneous PL broadening seen in Fig. 3共b兲. In summary, results presented here show that the luminescence from QDs structures is inherently radiation tolerant due to the effects of three-dimensional quantum confinement. An increase in radiation hardness of as much as two orders of magnitude has been obtained by comparisons with similar quantum wells. Additionally, we show that a slight increase in PL emission from InGaAs/GaAs QDs can be observed with low to moderate proton doses. 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M. Sotomayor-Torres, and C. Weisbuch, Phys. Rev. B 44, 10945 共1991兲. 21 S. Fafard, S. Raymond, G. Wang, R. Leon, D. Leonard, S. Charbonneau, J. L. Merz, P. M. Petroff, and J. E. Bowers, Surf. Sci. 362, 778 共1996兲. 22 G. Bacher, C. Hartmann, H. Schweizer, T. Held, G. Mahler, and H. Nickel, Phys. Rev. B 47, 9545 共1993兲. 1 2 FIG. 3. Radiation induced changes 共with 1.5 MeV protons at a dose of 3.5⫻1013 cm2兲 in the QD PL temperature dependence. 共a兲 Total integrated PL emission from QD structures, filled circles show signal before proton irradiation, hollow squares indicate signal after irradiation. 共b兲 Temperature dependence of the inhomogeneous broadening of the PL emission from QDs before 共filled circles兲 and after irradiation 共hollow squares兲. ated carrier diffusion lengths in the barrier and wetting layer materials. These will be affected by radiation induced damage and will contribute to degradation in QD PL emission, by limiting carrier capture into the dots. The rate of carrier transfer to the QDs is limited by the rate of lateral transport in the InGaAs WL, which for photogenerated carriers is governed by hole diffusion. Reduction in diffusion lengths or mobilities in the barrier material 共GaAs兲 and in the InGaAs WL is the main cause for the first PL degradation observed in QDs with very high proton doses. Figure 3 shows some subtle effects of proton radiation on the temperature dependence of the QD luminescence signal 共these are normalized over the degraded signal measured at 5 K兲. In the absence of midgap levels 共nonradiative recombination兲 the temperature dependence of the integrated PL signal from dense QD ensembles is closely related to their confining potential21 just as in QWs.22 Defect induced recombination could lower the values for this activation energy. This could explain the slightly lower activation energy shown in Fig. 3共a兲 after radiation damage. The lower normalized PL at temperatures ⬃100 K can be explained from the This article is copyrighted as indicated in the article. Reuse of AIP content is subject to the terms at: http://scitation.aip.org/termsconditions. Downloaded to IP: 209.147.144.21 On: Tue, 10 Feb 2015 00:38:32